Patent

System and method for surface inspection of micro- and nanomechanical structures.

Year2005-07-14
Priority ApplicationEP20050380157. WO2006ES00405.
InventorsJ. Tamayo, J. Mertens, M. Calleja
OwnersCSIC
Licensed to   Johann Mertens
  Javier Tamayo
  Montserrat Calleja
Ext. ApplicantsMecWins S.L.
Research GroupsBionanomechanics

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