Investigation of the bond strength between the photo-sensitive polymer SU-8 and Au

Authors   Montserrat Calleja
Co-authorsM. Nordström, A. Johansson, E. Sánchez Noguerón, R. Marie, B. Clausen, M. Calleja, A. Boisen
JournalMicroelectronic Engineering
Research GroupsBionanomechanics

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