Detection Limits in Nanomechanical Mass Flow Sensing for Nanofluidics With Nanowire Open Channels

Authors   Álvaro San Paulo
  Eduardo Gil-Santos
  Javier Enrique Escobar
  Juan Molina Fernández
  Jose Jaime Ruz Martinez
  Javier Tamayo
  Montserrat Calleja
  Oscar Malvar Vidal
  Priscila Monteiro Kosaka
Journal2023 IEEE 36th Internation Conference on Micro Electro Mechanical Systems (MEMS)

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