Experimental Vibration Modes of a microcantilever by Laser Beam Deflection Microscopy
There is a need for noninvasive techniques for simultaneous imaging of the stress and vibration mode shapes of nanomechanical systems in the fields of scanning probe microscopy, nanomechanical biological and chemical sensors and the semiconductor industry. Here we show a novel technique that combines a scanning laser, the beam detection method and digital multifrequency excitation…